Microsystems and Nanotechnology

In this course we present the physico-chemical processes used to manufacture structures and devices at microscopic scale on silicon and the connection of this technology to the subject of microsensors. The presentation of the operation of electronic configurations that are produced with these processes has been done in the course "Physics of Electronic Configurations" taught to the students of 8th semester.

Objectives

The purpose of this course is to describe the physics of of microsystems technology manufacturing processes (which are largely those of the manufacture of integrated circuits) and then show how they apply to the development of microsensors.

Prerequisites

no prerequisites

Syllabus

Microsystems and nanosystems: Definition and examples of microsystems. Consistency of microelectronics, micro-optics and micro-electromechanical technology. Basic technological manufacturing processes of microsystems and mathematical models. Crystal development and basic properties. Thermal oxidation. Diffusion of impurities. Ion implantation. Chemical and physical deposition of conductive and insulating layers. Lithograph. Engraving. Examples of manufacturing microelectronic devices and configurations and systems.Special micromechanical processes - Microsensors: surface and volume micromechanical processing. Micro-sensors and activators, physical principles of operation. Construction technology and examples of physical and biochemical sensors. From microtechnology to nanotechnology and nano-systems: Methods of making the nanometer scale. Auto-organization and regulated manufacturing nanoparticles. Contact the macrocosm. Applications in nanoelectronics and nano-sensors.